Consortium

The Emerging Nanopatterning Methods (NaPa) consortium integrates the best of existing European know-how in nanolithography, including the leading institutes and companies active in the field of nanopatterning into a single Integrated Project.

The approach taken by the NaPa consortium complements optical lithography by providing cost-efficient processes and tools to cover the needs of nanopatterning from CMOS back-end processes through photonics to biotechnology. To achieve this, research in three technology strands will be pursued: nanoimprint lithography, soft lithography & self-assembly and MEMS-based nanopatterning. While the first is at a crucial embryonic stage, requiring prompt consolidation to yield its first products in the near future, the latter two are of longer term in nature.

Thus, thematically, the consortium embraces and pushes forward the state-of-the-art developments in the physical and engineering sciences with the object-driven mission to provide European industrial and academic researchers with the know-how to underpin innovations and further scientific developments in nanotechnology.


NaPa Core Partners
Technical Research Centre of Finland (VTT) - Finland
Tyndall National Institute - National Microelec- tronics Research Centre (NMRC/Tyndall) - Ireland
Ecole Polytechnique Federale de Lausanne (EPFL) - Switzerland
IBM Research GmbH (IBM) - Switzerland
IBM
Laboratoire d'Analyse et d'Architecture des Systèmes (LAAS-CNRS) - France
Micro Resist Technology GmbH (MRT) - Germany
Tyndall National Institute - National Microelec- tronics Research Centre (NMRC/PNG) - Ireland
SUSS MicroTec AG (SUSS) - Germany

Participating Groups
Centre suisse d'Electronique et de Microtechnique (CSEM) - Switzerland
AMO GmbH Gesellschaft für Angwandte Mikro- und Optoelektronik mbH (AMO) - Germany
CEMES-CNRS Centre d'Elaboration de Materiaux et d'Etudes structurales (CEMES) - France
Fundacion CIDETEC (CIDETEC) - Spain
Consejo Superior de Investigaciones Cientificas - Instituto de Microelectronica de Barcelona (CNM) - Spain
EV Group, E. Thallner GmbH (EVG) - Austria
C.R.F. Societá Consortile per Azioni (CRF) - Italy
Institute of Microelectronics Technology, Russian Academy of Sciences (IMT) - Russia
 
Fundacion Inasmet (Inasmet) -Spain
Instituto per i Processi Chimico Fisici sezione di Bari Consiglio Nacionale delle Ricerche (IPCF) - Italy
Commissariat à l'Energie Atomique (LETI) - France
Linköpings Universitet (LiU) - Sweden
LPN-CNRS Laboratoire de Photonique et de nanostructures, Délégation Régionale  Ile de France, Ouest et Nord (LPN) - France
LTM-CNRS laboratoire des Technoloquies de la Microelectronique, Délégation Régionale Rhône-Alpes (LTM) - France
Lund University (LU) - Sweden
University of Twente, MESA+ Research Institute (SMCT) - Netherlands
Technical University of Denmark (MIC) - Denmark
 
NanoComms (NC) - Ireland
Nanoplus Nanosystems and Technologies GmbH (nanoplus) - Germany
NPL Management  Ltd (NPL) - United Kingdom
Obducat (obd) - Sweden
Paul Scherrer Institut (PSI) - Switzerland)
Instituto Nazionale fisica della Materia (TASC) - Italy
Fundacion Tekniker (Tekniker) - Spain
Fundacion TEKNIKER
University of Glasgow (UG) - United Kingdom
Warsaw university of Technology (WUT) - Poland
University of Twente (AMK) - Netherlands